Ama-microstructures e-Hybrid periodic microstructures kumafilimu e-chromium alungiswe yi-SLM-assisted nanosecond laser technique.

2024-09-26

I-Spatial light modulator iyingxenye eguqukayo engashintsha ubude, isigaba kanye nesimo se-polarization sokukhanya kwesigameko ngesikhathi sangempela ngaphansi kokulawulwa kwesignali yangaphandle. Ukusetshenziswa kwe-spatial light modulator ekucubunguleni i-laser kungabona ukubunjwa kwemishayo okuguquguqukayo, futhi kunezinzuzo zokuhleleka, kulula ukulawula, ukuhlanganisa okulula, ukulahlekelwa okuphansi kanye nemvamisa ephezulu yokuvuselela. Futhi ngokuthuthukiswa komkhawulo womonakalo wamamoduli wokukhanya wendawo, izinkambu zokufaka isicelo zokucutshungulwa kwe-laser nazo ziyakhula, njengokukhiqizwa kwesakhiwo se-metamaterial, i-microfluidic, ukuphrinta kwe-3D, isitoreji esibonakalayo, ukuguqulwa kwendawo ebonakalayo, amachashazi e-quantum neminye imikhakha.

Ulwazi lweThesis:

Kuleli phepha, kuthulwa indlela esebenzayo yokulungiswa kwezinhlaka zenkathi eyingxube ehlukene kumafilimu e-chromium (Cr) anogqinsi oluhlukile kusetshenziswa imodulator yokukhanya yendawo (SLM) esiza i-1064nm nanosecond laser. Kumafilimu e-1000nm Cr, ama-MG-LIPS ajwayelekile anezilinganiso ezimbili angalungiswa ngokuhlanganisa i-periodic modulation grating (MG) ekhiqizwe yi-SLM ne-laser induced periodic surface structure (LIPSS), izici zayo ze-morphological zilawulwa yi-laser flux, inani lama-pulses asebenzayo nesikhathi se-MG. Ngenxa yomphumela wokuphazamiseka we-MG ne-LIPSS, ingaphezulu lephethini ye-MG-LIPSS libonisa imibala egqamile yesakhiwo se-anisotropic. Ngenxa yengcindezi yokushisa ebaluleke kakhulu yamafilimu azacile uma kuqhathaniswa ne-MG-LIPss, kwakheka ukwakheka kwezikhathi ezithile okuyinkimbinkimbi okuhlanganisa i-MG kanye nokuqhekeka (MGC) kumafilimu angu-200nm Cr. Nakuba imifantu ye-MGC isatshalaliswa ngokungahleliwe, i-MGC inesici sokuhleleka eside kokudluliswa okuthile futhi ingasetshenziswa njengegridi yokudlulisela enomphumela wokuphazamiseka. Le miphumela ibonisa ukuthi i-SLM-based light field modulated laser processing inikeza indlela ephumelelayo, eyongayo futhi elawulekayo yokulungiselela izakhiwo zezikhathi zendawo enkulu kumafilimu e-Cr. Ukwengeza, izinguquko kugqinsi lwefilimu zingasetshenziswa ukuhlola i-hybrid microstructure enezici ezithile zezinhlelo zokusebenza ezihlukene, njengezingxenye ezibonayo kanye nezindlela zokulwa nomgunyathi.

Okulandelayo kuyingxenye yenqubo yokuhlola kanye nemiphumela:

Umthombo wokukhanya usebenzisa i-nanosecond laser yokuhweba, ehlinzeka ngelaser engu-1064nm, 50ns linear polarization pulse laser. Imvamisa yokuphinda isethelwe ku-3kHz ngesikhathi sokuhlolwa, futhi amandla aphezulu ahambisanayo okukhipha i-laser ngu-0.45W. Ukukhanya okukhishwa kwi-laser kudlula esibukweni esinwebekayo esingu-4×, ukuze indawo yokukhanya igcwale indawo eqondiwe yevalvu yokukhanya eyikristalu. I-modulator yokukhanya kwendawo yesigaba (FSLM-2K70-VIS) isetshenziswa ekuhlolweni, usayizi wephikseli ngu-8um, kanti ukulungiswa kungu-1920 × 1080. Ngemva kokuguqulwa yi-modulator yokukhanya kwendawo, yenziwa kusampula nge-lens, futhi inqubo yokucubungula igadwa ngesikhathi sangempela yi-CCD ukuze kuqinisekiswe ukuthi indawo yesampula ihlezi indiza yokucubungula. Ihologram yenziwe i-algorithm ye-Gerchberg Saxton.

I-FIG. 1 (a) Idivayisi yokuhlola (Imodula yokukhanya kwendawo yesigaba, imodeli: FSLM-2K70-VIS); (b) Imishayo yoqobo neshintshiwe.

I-FIG. 2 SEM morphology yamafilimu amancane angu-1000nmCr akhiwe yi-MG-LIPSS ngaphansi kwezikhathi zokumodulation ezi-4 ezihlukene Γ njengoba i-laser flux ikhula. Isikali: 5μm.

I-FIG. I-3 SEM morphology ye-MG-LIPSS eyakhiwe amafilimu angu-(a)-(c) 1000nmCr ngaphansi kwezinombolo ze-pulse ezisebenzayo ezihlukile. Isikali: 5μm.

I-FIG. 4 (a)0.27J/cm² kanye (e) 0.32J/cm² zihambisana nezilinganiso ze-AFM zezakhiwo ze-MG-LIPSS ngaphansi kwemisebe ye-laser ehlukene, ngokulandelanayo. (b) kanye no-(f) kuhambisana nokuguqulwa kwe-Fourier okusheshayo okuyizinhlangothi ezimbili kwezithombe ze-SEM (a) kanye no-(e), ngokulandelanayo. (c) kanye (d) Imidwebo enezinhlangothi ezimbili yezingxenye eziphambanayo ze-LIPSS kanye ne-MG ehambisana (a) ne-MG-LIPss. (g) kanye no-(h) ayimidwebo enezinhlangothi ezimbili yezingxenye eziphambanayo ze-LIPSS kanye ne-MG ehambisana (e) ne-MG-LIPss. Isikali: 5μm.

Umfanekiso 5 (ab) I-MicroRaman spectra ye-MG-LIPSS elungiswe kuma-laser fluxes amabili ahlukene F ezindaweni ezahlukene. (cf) Imiphumela ye-EDS ye-MG-LIPSS elungiselelwe kuma-laser fluxes ahlukene F (amaphuzu okuqoqwa amakwe ngokubomvu esithombeni). Isikali: 5μm.

I-FIG. I-6 SEM morphology ye-MGC yakheke ngaphansi kwezimo ezihlukene zokucutshungulwa kwefilimu ye-Cr ku-200nm. (a) Γ2 = 8 μm, F = 0.16 J/cm². (b) Γ3 = 9 μm, F = 0.16 J/ cm². (c) Γ4 = 13 μm, F = 0.16 J/cm². (d) Γ4 = 13 μm, F = 0.30 J/cm². Isikali: 5μm.

Umfanekiso 7 Umbala wesakhiwo sothingo lwenkosazana we-MG-LIPSS. (a) Umdwebo omhlophe we-diffraction wokukhanya okumhlophe we-MG-LIPSS yesakhiwo sezikhathi esixubile esakhiwe ngefilimu engu-1000nmCr, ene-LIPSS ne-MG ekhiqiza imibala yesakhiwo sothingo ngezindlela ezimbili ze-orthogonal, ngokulandelanayo. (b) Iphethini yezinhlamvu zesiShayina ze-"Sun Yat-sen University" inamethwe ngo-1000nm Cr kusinkwa esiyingilazi esinobubanzi obungu-100 mm. (c) Amasampula asetshenziwe. (d) kanye (e) faka umbala iphethini ye-"Sun Yat-sen University" kanye nephethini kadrako ngokulandelanayo. (f) kanye (g)MG-LIPSS "3" ayimifanekiso ehlukene yemibala yesakhiwo esinama-engeli ahlukene okubuka. Isikali: 5mm.

Amapharamitha wemoduli yokukhanya kwendawo asetshenziswe kulokhu kuhlolwa ami kanje:

Inombolo yemodeli	FSLM-2K70-P03	Uhlobo lokuguquguquka	Iphethini yesigaba
Uhlobo lwekristalu eliwuketshezi	Uhlobo olukhombisayo	Izinga elimpunga	8 bits, 256 amazinga
Imodi yekristalu ewuketshezi	I-PAN	Imodi yokushayela	umfanekiso
Isixazululo	1920×1080	Usayizi wephikseli	8.0μm
Isifunda esisebenzayo	0.69" 15.36mm×8.64mm	Isici sokugcwalisa	87%
ukucaba(I-PV）	Ngaphambi kokulinganisa: 5λ Ngemuva kokulinganisa: 1 λ	ukucaba(RMS)	Ngaphambi kokulinganisa: 1/3 λ Ngemuva kokulinganisa: 1/10λ
Vuselela imvamisa	60Hz	Isikhathi sokuphendula	≤30ms
Ukusebenza kahle kwamehlo	75%@1064nm	I-engeli yokuqondanisa	0°
Ibanga lesigaba	2π@1064nm Ubukhulu:2.1π@1064nm	Ububanzi be-Spectral	450nm-1100nm
Gamma lungisa	ukusekela	Ukulungiswa kwesigaba	ukusekela (808nm/1064nm)
umugqa	≥99%	Ukuzinza kwesigaba(I-RMS）	≤0.13π
Umkhawulo wokulimala	Okuqhubekayo: ≤20W/cm2(akukho ukupholisa amanzi) ≤100W/cm2(okupholiswe ngamanzi)	Ukusebenza kahle kwe-Diffraction	1064nm 60%@L8 66%@L16 75%@L32

Ukuze kuthuthukiswe ukusetshenziswa kwemodulator yokukhanya kwendawo embonini, leli phepha liyathuthukiswaUmonakalo omkhulu, isikwele esikhulu sethagethi yesimojuli sokukhanya sendawo:

Inombolo yemodeli	I-FSLM-2K73-P03HP	Uhlobo lokuguquguquka	Iphethini yesigaba
Uhlobo lwekristalu eliwuketshezi	Uhlobo olukhombisayo	Izinga elimpunga	8 noma 10 amabhithi ngokuzithandela
Imodi yekristalu ewuketshezi	I-PAN	Imodi yokushayela	umfanekiso
Isixazululo	2048×2048	Usayizi wephikseli	6.4μm
Isifunda esisebenzayo	0.73" 13.1mm×13.1mm	Isici sokugcwalisa	93%
Vuselela imvamisa	60Hz (8bit)*	Okokufaka kwamandla	12V 3A
I-engeli yokuqondanisa	0°	Isixhumi esibonakalayo sedatha	I-HDMI
Ibanga lesigaba	2π@1064nm Ubukhulu:3.5π@1064nm	Ububanzi be-Spectral	1000nm-1100nm
Ukusebenza kahle kwamehlo	95%±5%@1064nm	Isikhathi sokuphendula	≤30ms
Ukulungiswa kwe-Gamma	ukusekela	Ukulungiswa kwesigaba	Ukusekela (1064nm)
umugqa	≥99%	Ukuzinza kwesigaba (RMS)	＜0.03π
Umkhawulo wokulimala	Okuqhubekayo: ≤1000W/cm2(akukho ukupholisa amanzi) Pulse: Ukuminyana kwamandla okuphezulu (10GW/cm2) Ukuminyana kwamandla okumaphakathi (100W/cm2) @1064nm/290fs/200KHz (amanzi apholisiwe)	Ukusebenza kahle kwe-Diffraction	1064nm 56%@L8 72%@L16 85%@L32

Bhala ekugcineni:

Ngokuthuthuka okuqhubekayo kobuchwepheshe bokucutshungulwa kwe-laser kanye nesidingo esikhulayo sezinkomba zokucubungula ezinembayo nezisebenza kahle kakhulu, i-modulator yokukhanya yendawo, njengengxenye eyinhloko ye-optical, izodlala indima ebalulekile. Ukusetshenziswa kwe-modulator yokukhanya kwendawo ekucutshungulweni kwe-laser akukhawulelwe emkhakheni owodwa wezobuchwepheshe, amathuba okusebenza kwawo okubanzi ahlanganisa imikhakha eminingana, njengokukhiqizwa kwezimboni, ucwaningo lwesayensi, i-optoelectronics, njll., ukuze kuthuthukiswe futhi kusungulwe ubuchwepheshe bokucubungula i-laser bunikeza ukwesekwa okuqinile namandla okushayela, kulindeleke ukuthi kukhuthaze ubuchwepheshe bokucubungula i-laser bufinyelele ekuqondeni okuthuthuke kakhulu, okuyinkimbinkimbi kakhulu.